With the continuous advancement of integrated circuit technology, innovations such as advanced processes, 3D integration, and optoelectronic hybrid integration are driving the development of electronic information technology in the post-Moore era. In the face of the continuous miniaturization of processes and device structures and the widespread application of heterogeneous materials, manufacturing-oriented Electronic Design Automation (EDA) technologies are increasingly becoming a crucial foundation supporting chip design, process simulation, and device innovation. Advanced Technology Computer-Aided Design (TCAD) simulation platforms not only play a vital role in new process development, device performance optimization, and material innovation, but also provide essential technical support for the high-quality development of the electronic information industry.

    In response to the major deployment of "Science and Technology Innovation 2030" in the fields of semiconductors and integrated circuits, Micius Laboratory has established a Research Center for Manufacturing-Oriented EDA. The center fully integrates innovative resources both within and outside the laboratory in areas such as semiconductor processes, device physics, nanomaterials, artificial intelligence (AI), and high-performance computing. It focuses on cross-scale multi-physics TCAD process and device simulation, simulation of nano-electronic and optoelectronic devices, design-technology co-optimization (DTCO), and novel algorithm research combining AI with physical models. The center is dedicated to independently developing key technologies such as multi-scale, multi-physics, multi-material systems and large-scale integrated simulation, providing strong support for end-to-end innovation and industrial applications—from materials computation and virtual manufacturing to device simulation and circuit design.

    Currently, the center has assembled a high-level research and development team composed of leading experts from the Chinese Academy of Sciences and both internal and external specialists in semiconductor devices and EDA. The team is actively working on developing multiple TCAD software packages and core algorithms with independent intellectual property rights. The goal is to establish a globally competitive manufacturing-oriented EDA platform and a series of related achievements, thereby enhancing the laboratory’s capabilities in independent innovation and technological leadership in the fields of micro/nano-electronics and optoelectronic simulation and design.