The Micius Laboratory Process Testing Platform is located in the Zhongyuan Quantum Valley Innovation Base, with an ultra clean laboratory space over 4500 square meters, equipped with complete production lines for epitaxy, photolithography, etching, thin film, packaging and testing, and more than 100 sets of semiconductor process equipment. It currently has a research and development team of more than 50 PhDs. The platform focuses on the research and manufacturing of first to fourth generation semiconductor materials (Si, GaAs, GaN, Ga2O3) and two-dimensional material chips, with a focus on collaborative research and development of micro-nano optoelectronic chips. It not only supports internal scientific research needs, but also provides chip research and development and small batch trial production services for startups and research institutes. As the first professional chip process platform in Henan Province, this platform fills the gap in key links of the semiconductor industry in the province and provides important support for the development of the regional semiconductor industry.


