Engineering Support Department

Chen Wu, an equipment engineer at the Micius Laboratory, mainly engages in the installation, commissioning, and maintenance of semiconductor equipment. His main responsibilities include: 1. Secondary distribution installation of etching, thin film, photolithography and other equipment, assisting manufacturers in hardware commissioning and acceptance. 2. Researching spare parts for equipment, domestic substitution of spare parts, and reducing equipment consumables costs. 3. Daily inspection, maintenance and upkeep of equipment, troubleshooting equipment malfunctions, and modifying equipment to enhance its stability. 4. Writing equipment operation SOP, inspection forms, and equipment safety management.
Educational Background
2005.9 - 2008.7 Xi'an Aeronautical Vocational College, Applied Electronics Major
Work Experience
2022.11 - 2024.11 Guangdong Semiconductor Micro-Nano Manufacturing Technology Research Institute, Equipment Engineer
Main Responsibilities
1. Participated in the Move-in, positioning, and splicing of equipment such as etching machines, thin film machines, and photolithography machines.
2. Wrote the water, electricity, and gas specifications required for the equipment and assisted the plant services in the connection of water, electricity, and gas for equipment commissioning and other preparatory work.
3. Responsible for the commissioning of implanters. Successfully restored an implanter without external assistance.
4. Responsible for the later maintenance and upkeep of implanters, wrote equipment operation SOP, equipment anomaly analysis reports, and trained process personnel on the correct operation of the machines.
