Engineering Support Department
Zhang Huakang (Director)Facility and Equipment Department Director

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Huakang Zhang

Facility and Equipment Department Director

Email: zhanghuakang@hnas.ac.cn

Zhang Huakang, Director of Facility and Equipment Department of Micius Laboratory, He has worked in Guangdong Zhongke Semiconductor Micro-Nano Manufacturing Technology Research Institute and Suzhou Institute of Nanotechnology and Nanobionics, Chinese Academy of Sciences. He has been engaged in equipment and factory management for a long time. He has published 3 related papers and obtained more than 10 patents.

Education Background

2001.09-2005.07 Bachelor of Electronic Science and Technology (Microelectronics), Fuzhou University

2019.09-2022.12 Master of Business Administration, Shandong University

Work Experience

2011.03-2017.10 Senior Engineer in Aixtron China

2020.04-2022.06 Director of Processing Platform Equipment, Suzhou Institute of Nanotechnology and Nanobionics, Chinese Academy of Sciences

2022.06-2024.06 Director of Processing Platform Equipment of Guangdong Zhongke Semiconductor Micro and Nano Manufacturing Technology Research Institute

2024.07-present Director of Facility and Equipment Department of Micius Laboratory

Research grant

Development of On-line Activation and Regeneration System for Molecular Beam Epitaxy Equipment, Technical Innovation Project of Instrument and Equipment Function Development of Chinese Academy of Sciences

Henan Science and Technology Special Project "a New Type of MIST CVD Equipment"